Product lineup

Laser microscope

Spec

Ablation excavating resolution	20nm
Ablation area	Up to 2mm x 2mm x 2mm
Ablation processing speed	Up to 20mm/s
Installation area	1.5m x 2.5m

Accelerating voltage	1 -30kV (according to the SEM basic specification)
Sample size	Up to 2 inchs (according to the SEM basic specification)
Minimum line width	0.1um
Stage components	two axes of XY: Automatic Z-axis: Manual (Automatic: Optional)
Stage precision	Repeated positioning ± 0.1um
Detection of stage position	Linear encoder 0.01um
Feature	Combined use with the observation function GUI / CAD: Standard equipment

JSM5000/6000 series is a product of JEOL Ltd.

Driving source	Piezoelectric element
Element constitution	4 layers of shearing element, 4 layers of expansion/contraction element
Resolution	less than 0.6nm
Maximum speed	50mm/s
Speed resolution	less than 0.1% of the speed
Feature	Corresponds to non-magnetic, or vacuum one
Others	Specialized controller

Option	Substrate size
	Heating or cooling substrate etc.
	Sample conveying mechanism
	Gas introducing system
	Exhaust system
	Control system
	Mounting etc.

We will design and manufacture in accordance to the customer's request.

Vacuum chamber
Size	φ 406ICF (Height: 550mm)
Material	SUS304
Surface treatment	Electrolytic polishing
Note	O-ring style, front door, viewport with a shutter
Mounting
Size	580(W)x945(H)x700(D)
Material	SS400
Coating	Brown baking finish
Note	Height adjustment range (920~970)

Beside the above, we will design and manufacture in accordance to the customer's request, such as number of ports, or shape (round/square) etc.

Board format	VME double size
Corresponding device	Laser interferometer I/F RLE-20, manufactured by Renishaw plc.
Axis constitution	Two-axes of XY
Resolution	Select from 0.3, 0.15, 0.07, 0.03nm
Feature	Software compatible with A10897/10898 manufactured by Agilent Technologies

Driving source	Five-phase driving type stepping motor
Axis constitution	Three-axes of XYZ
Length measurement	Linear encoder
Resolution	0.01 μm at minimum
Material	Mainly composed of Aluminum
Environment	Atmosphere - 10^-5Pa (high vacuum region)
Control system	Corresponds to the controller of our company

Driving source	Selectable from linear motor, stepping motor, piezo-motor etc.
Length measurement	Selectable from Linear encoder, Laser interferometer etc.
Resolution	0.6nm at minimum
Material	Alumina ceramics
Environment	Atmosphere - 10^-5Pa (high vacuum region)
Control system	Corresponds to the controller of our company

Driving source	Five-phase driving type stepping motor
Axis constitution	Up to four-axes
Resolution	Only motor	10nm at minimum
	Combination with PZT	1nm at minimum
Control form	Positioning servo system
	Only motor	PI type servo
	Combination with PZT	PI+ST-Observer
External control	TCP/IP, RS-232C

Corresponding SEM	JSM5000/6000 series, manufactured by JEOL Ltd.
Material	Permalloy
Attenuation rate	less than 1/20
Weight	2.6 kg

JSM5000/6000 series is a product of JEOL Ltd.